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Microfabrication for Industrial Applications

Microfabrication for Industrial Applications
  • Author : Regina Luttge
  • Publisher :Unknown
  • Release Date :2011-08-31
  • Total pages :312
  • ISBN : 9780815519775
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Summary : This book focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. It gives a history of miniaturization, micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices. Concerning sub-micron feature manufacture, the book explains: the philosophy of micro/ nanofabrication for integrated circuit industry; thin film deposition; (waveguide, plastic, semiconductor) material processing; packaging; interconnects; stress (e.g., thin film residual); economic; and environmental aspects. Micro/nanomechanical sensors and actuators are explained in depth with information on applications, materials (incl. functional polymers), methods, testing, fabrication, integration, reliability, magnetic microstructures, etc. Shows engineers & students how to evaluate the potential value of current and nearfuture manufacturing processes for miniaturized systems in industrial environments Explains the top-down and bottom up approaches to nanotechnology, nanostructures fabricated with beams, nano imprinting methods, nanoparticle manufacturing (and their health aspects), nanofeature analysis, and connecting nano to micro to macro Discusses issues for practical application cases; possibilities of dimension precision; large volume manufacturing of micro- & nanostructures (machines, materials, costs) Explains applications of Microsystems for information technology, e.g.: data recording (camera, microphone), storage (memories, CDs), communication; computing; and displays (beamers, LCD, TFT) Case studies are given for sensors, resonators, probes, transdermal medical systems, micro- pumps & valves, inkjets, DNA-analysis, lab-on-a-chip, & micro-cooling

Nano- and Microfabrication for Industrial and Biomedical Applications

Nano- and Microfabrication for Industrial and Biomedical Applications
  • Author : Regina Luttge
  • Publisher :Unknown
  • Release Date :2016-06-12
  • Total pages :278
  • ISBN : 9780323389280
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Summary : Nano- and Microfabrication for Industrial and Biomedical Applications, Second Edition, focuses on the industrial perspective on micro- and nanofabrication methods, including large-scale manufacturing, the transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. The book gives a history of miniaturization and micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices. In this second edition, a new focus area is nanoengineering as an important driver for the rise of novel applications by integrating bio-nanofabrication into microsystems. In addition, new material covers lithographic mould fabrication for soft-lithography, nanolithography techniques, corner lithography, advances in nanosensing, and the developing field of advanced functional materials. Luttge also explores the view that micro- and nanofabrication will be the key driver for a "tech-revolution" in biology and medical research that includes a new case study that covers the developing organ-on-chip concept. Presents an interdisciplinary approach that makes micro/nanofabrication accessible equally to engineers and those with a life science background, both in academic settings and commercial R&D Provides readers with guidelines for assessing the commercial potential of any new technology based on micro/nanofabrication, thus reducing the investment risk Updated edition presents nanoengineering as an important driver for the rise of novel applications by integrating bio-nanofabrication into microsystems

Three-Dimensional Microfabrication Using Two-Photon Polymerization

Three-Dimensional Microfabrication Using Two-Photon Polymerization
  • Author : Tommaso Baldacchini
  • Publisher :Unknown
  • Release Date :2015-09-29
  • Total pages :512
  • ISBN : 9780323354059
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Summary : Three-Dimensional Microfabrication Using Two-Photon Polymerization (TPP) is the first comprehensive guide to TPP microfabrication—essential reading for researchers and engineers in areas where miniaturization of complex structures is key, such as in the optics, microelectronics, and medical device industries. TPP stands out among microfabrication techniques because of its versatility, low costs, and straightforward chemistry. TPP microfabrication attracts increasing attention among researchers and is increasingly employed in a range of industries where miniaturization of complex structures is crucial: metamaterials, plasmonics, tissue engineering, and microfluidics, for example. Despite its increasing importance and potential for many more applications, no single book to date is dedicated to the subject. This comprehensive guide, edited by Professor Baldacchini and written by internationally renowned experts, fills this gap and includes a unified description of TPP microfabrication across disciplines. The guide covers all aspects of TPP, including the pros and cons of TPP microfabrication compared to other techniques, as well as practical information on material selection, equipment, processes, and characterization. Current and future applications are covered and case studies provided as well as challenges for adoption of TPP microfabrication techniques in other areas are outlined. The freeform capability of TPP is illustrated with numerous scanning electron microscopy images. Comprehensive account of TPP microfabrication, including both photophysical and photochemical aspects of the fabrication process Comparison of TPP microfabrication with conventional and unconventional micromanufacturing techniques Covering applications of TPP microfabrication in industries such as microelectronics, optics and medical devices industries, and includes case studies and potential future directions Illustrates the freeform capability of TPP using numerous scanning electron microscopy images

Smart Sensors and MEMS

Smart Sensors and MEMS
  • Author : S Nihtianov,A. Luque
  • Publisher :Unknown
  • Release Date :2014-03-24
  • Total pages :560
  • ISBN : 9780857099297
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Summary : Smart sensors and MEMS can include a variety of devices and systems that have a high level of functionality. They do this either by integrating multiple sensing and actuating modes into one device, or else by integrating sensing and actuating with information processing, analog-to-digital conversion and memory functions. Part one outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, and advanced optical incremental sensors (encoders and interferometers), among other topics. The second part of the book describes the industrial applications of smart micro-electro-mechanical systems (MEMS). Some of the topics covered in this section include microfabrication technologies used for creating smart devices for industrial applications, microactuators, dynamic behaviour of smart MEMS in industrial applications, MEMS integrating motion and displacement sensors, MEMS print heads for industrial printing, Photovoltaic and fuel cells in power MEMS for smart energy management, and radio frequency (RF)-MEMS for smart communication microsystems. Smart sensors and MEMS is invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry, and engineers looking for industrial sensing, monitoring and automation solutions. Outlines industrial applications for smart sensors and smart MEMS Covers smart sensors including capacitive, inductive, resistive and magnetic sensors and sensors to detect radiation and measure temperature Covers smart MEMS including power MEMS, radio frequency MEMS, optical MEMS, inertial MEMS, and microreaction chambers

Laser Precision Microfabrication

Laser Precision Microfabrication
  • Author : Koji Sugioka,Michel Meunier,Alberto Piqué
  • Publisher :Unknown
  • Release Date :2010-08-13
  • Total pages :344
  • ISBN : 3642105238
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Summary : Miniaturization and high precision are rapidly becoming a requirement for many industrial processes and products. As a result, there is greater interest in the use of laser microfabrication technology to achieve these goals. This book composed of 16 chapters covers all the topics of laser precision processing from fundamental aspects to industrial applications to both inorganic and biological materials. It reviews the sate of the art of research and technological development in the area of laser processing.

Microfabrication and Nanomanufacturing

Microfabrication and Nanomanufacturing
  • Author : Mark J. Jackson
  • Publisher :Unknown
  • Release Date :2005-11-10
  • Total pages :401
  • ISBN : 9781420028270
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Summary : Nanotechnology, seen as the next leap forward in the industrial revolution, requires that manufacturers develop processes that revolutionize the way small products are made. Microfabrication and Nanomanufacturing focuses on the technology of fabrication and manufacturing of engineering materials at these levels. The book provides an overview of techniques used in the semiconductor industry. It also discusses scaling and manufacturing processes operating at the nanoscale for non-semiconductor applications; the construction of nanoscale components using established lithographic techniques; bulk and surface micromachining techniques used for etching, machining, and molding procedures; and manufacturing techniques such as injection molding and hot embossing. This authoritative compilation describes non-traditional micro and nanoscale processing that uses a newly developed technique called pulsed water jet machining as well as the efficient removal of materials using optical energy. Additional chapters focus on the development of nanoscale processes for producing products other than semiconductors; the use of abrasive particles embedded in porous tools; and the deposition and application of nanocrystalline diamond. Economic factors are also presented and concern the promotion and commercialization of micro and nanoscale products and how demand will eventually drive the market.

Micro-Manufacturing Technologies and Their Applications

Micro-Manufacturing Technologies and Their Applications
  • Author : Irene Fassi,David Shipley
  • Publisher :Unknown
  • Release Date :2017-01-31
  • Total pages :296
  • ISBN : 9783319396514
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Summary : This book provides in-depth theoretical and practical information on recent advances in micro-manufacturing technologies and processes, covering such topics as micro-injection moulding, micro-cutting, micro-EDM, micro-assembly, micro-additive manufacturing, moulded interconnected devices, and microscale metrology. It is designed to provide complementary material for the related e-learning platform on micro-manufacturing developed within the framework of the Leonardo da Vinci project 2013-3748/542424: MIMAN-T: Micro-Manufacturing Training System for SMEs. The book is mainly addressed to technicians and prospective professionals in the sector and will serve as an easily usable tool to facilitate the translation of micro-manufacturing technologies into tangible industrial benefits. Numerous examples are included to assist readers in learning and implementing the described technologies. In addition, an individual chapter is devoted to technological foresight, addressing market analysis and business models for micro-manufacturers.

Microfabrication and Precision Engineering

Microfabrication and Precision Engineering
  • Author : J Paulo Davim
  • Publisher :Unknown
  • Release Date :2017-01-15
  • Total pages :286
  • ISBN : 9780857094865
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Summary : Microfabrication and precision engineering is an increasingly important area relating to metallic, polymers, ceramics, composites, biomaterials and complex materials. Micro-electro-mechanical-systems (MEMS) emphasize miniaturization in both electronic and mechanical components. Microsystem products may be classified by application, and have been applied to a variety of fields, including medical, automotive, aerospace and alternative energy. Microsystems technology refers to the products as well as the fabrication technologies used in production. With detailed information on modelling of micro and nano-scale cutting, as well as innovative machining strategies involved in microelectrochemical applications, microchannel fabrication, as well as underwater pulsed Laser beam cutting, among other techniques, Microfabrication and Precision Engineering is a valuable reference for students, researchers and professionals in the microfabrication and precision engineering fields. Contains contributions by top industry experts Includes the latest techniques and strategies Special emphasis given to state-of-the art research and development in microfabrication and precision engineering

Manufacturing Techniques for Microfabrication and Nanotechnology

Manufacturing Techniques for Microfabrication and Nanotechnology
  • Author : Marc J. Madou
  • Publisher :Unknown
  • Release Date :2011-06-13
  • Total pages :670
  • ISBN : 9781439895306
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Summary : Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the d

3D Laser Microfabrication

3D Laser Microfabrication
  • Author : Hiroaki Misawa,Saulius Juodkazis
  • Publisher :Unknown
  • Release Date :2006-08-21
  • Total pages :403
  • ISBN : 9783527608409
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Summary : A thorough introduction to 3D laser microfabrication technology, leading readers from the fundamentals and theory to its various potent applications, such as the generation of tiny objects or three-dimensional structures within the bulk of transparent materials. The book also presents new theoretical material on dielectric breakdown, allowing a better understanding of the differences between optical damage on surfaces and inside the bulk, as well as a look into the future. Chemists, physicists, materials scientists and engineers will find this a valuable source of interdisciplinary knowledge in the field of laser optics and nanotechnology.

Laser Microfabrication

Laser Microfabrication
  • Author : Daniel J. Ehrlich,Jeffrey Y. Tsao
  • Publisher :Unknown
  • Release Date :1989-06-21
  • Total pages :587
  • ISBN : 9780080918020
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Summary : This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, thermochemical constants, etc.) for the active researcher.

Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication

Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication
  • Author : P. Rai-Choudhury
  • Publisher :Unknown
  • Release Date :1997
  • Total pages :692
  • ISBN : 0819423793
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Summary : Part of a compilation of diverse information into a single, two-volume resource just at the moment when researchers are weighing the alternatives to visible light that will be necessary to etch features smaller than 0.13 microns. Volume Two focuses on the process technology and the device applicatio

Micromanufacturing Engineering and Technology

Micromanufacturing Engineering and Technology
  • Author : Yi Qin
  • Publisher :Unknown
  • Release Date :2010-07-02
  • Total pages :432
  • ISBN : 081551980X
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Summary : This book presents applicable knowledge of technology, equipment and applications, and the core economic issues of micromanufacturing for anyone with a basic understanding of manufacturing, material, or product engineering. It explains micro-engineering issues (design, systems, materials, market and industrial development), technologies, facilities, organization, competitiveness, and innovation with an analysis of future potential. The machining, forming, and joining of miniature / micro-products are all covered in depth, covering: grinding/milling, laser applications, and photo chemical etching; embossing (hot & UV), injection molding and forming (bulk, sheet, hydro, laser); mechanical assembly, laser joining, soldering, and packaging. • Presents case studies, material and design considerations, working principles, process configurations, and information on tools, equipment, parameters and control • Explains the many facets of recently emerging additive / hybrid technologies and systems, incl: photo-electric-forming, liga, surface treatment, and thin film fabrication • Outlines system engineering issues pertaining to handling, metrology, testing, integration & software • Explains widely used micro parts in bio / medical industry, information technology and automotive engineering. • Covers technologies in high demand, such as: micro-mechanical-cutting, lasermachining, micro-forming, micro-EDM, micro-joining, photo-chemical-etching, photo-electro-forming, and micro-packaging

Thin Film Materials Technology

Thin Film Materials Technology
  • Author : Kiyotaka Wasa,Makoto Kitabatake,Hideaki Adachi
  • Publisher :Unknown
  • Release Date :2004-05-10
  • Total pages :532
  • ISBN : 9780815519317
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Summary : An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key technology for nano-materials in high-speed information applications and large-area functional coating such as automotive or decorative painting of plastic parts, among other topics. In seven concise chapters, the book thoroughly reviews basic thin film technology and deposition processes, sputtering processes, structural control of compound thin films, and microfabrication by sputtering.

Handbook of Nanomaterials for Sensing Applications

Handbook of Nanomaterials for Sensing Applications
  • Author : Chaudhery Mustansar Hussain,Suresh Kumar Kailasa
  • Publisher :Unknown
  • Release Date :2021-04-08
  • Total pages :662
  • ISBN : 9780128208847
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Summary : Handbook of Nanomaterials for Intelligent Sensing Applications provides insights into the production of nanosensors and their applications. The book takes an interdisciplinary approach, showing how nano-enhanced sensing technology is being used in a variety of industry sectors and addressing related challenges surrounding the production, fabrication and application of nanomaterials-based sensors at both experimental and theoretical levels. This book is an important reference source for materials scientists and engineers who want to learn more about how nanomaterials are being used to enhance sensing products and devices for a variety of industry sectors. The pof miniaturized device components and engineering systems of micro- and nanoscale is beyond the capability of conventional machine tools. The production of intelligent sensors at nanometer scale presents great challenges to engineers in design and manufacture. The manufacturing of nano-scaled devices and components involves isolation, transportation and re-assembly of atoms and molecules. This nanomachining technology involves not only physical-chemical processes as in the case of microfabrication, but it also involves application and integration of the principles of molecular biology. Explains how the functionalization of nanomaterials is being used to create more effective sensors Explores the major challenges of using nanoscale sensors for industrial applications on a broad scale Assesses which classes of nanomaterial should best be used for sensing applications

International Symposium on Laser Precision Microfabrication

International Symposium on Laser Precision Microfabrication
  • Author : Anonim
  • Publisher :Unknown
  • Release Date :2002
  • Total pages :229
  • ISBN : UOM:39015048324571
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Summary :

Micro Process Engineering

Micro Process Engineering
  • Author : Norbert Kockmann
  • Publisher :Unknown
  • Release Date :2006-03-17
  • Total pages :529
  • ISBN : 9783527312467
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Summary : This edition of 'Micro Process Engineering' was originally published in the successful series 'Advanced Micro & Nanosystems'. Authors from leading industrial players and research institutions present a concise and didactical introduction to Micro Process Engineering, the combination of microtechnology and process engineering into a most promising and powerful tool for revolutionizing chemical processes and industrial mass production of bulk materials, fine chemicals, pharmaceuticals and many other products. The book takes the readers from the fundamentals of engineering methods, transport processes, and fluid dynamics to device conception, simulation and modelling, control interfaces and issues of modularity and compatibility. Fabrication strategies and techniques are examined next, focused on the fabrication of suitable microcomponents from various materials such as metals, polymers, silicon, ceramics and glass. The book concludes with actual applications and operational aspects of micro process systems, giving broad coverage to industrial efforts in America, Europe and Asia as well as laboratory equipment and education.

Microfluidics for Pharmaceutical Applications

Microfluidics for Pharmaceutical Applications
  • Author : Helder A. Santos,Dongfei Liu,Hongbo Zhang
  • Publisher :Unknown
  • Release Date :2018-10-12
  • Total pages :495
  • ISBN : 9780128126608
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Summary : Microfluidics for Pharmaceutical Applications: From Nano/Micro Systems Fabrication to Controlled Drug Delivery is a concept-orientated reference that features case studies on utilizing microfluidics for drug delivery applications. It is a valuable learning reference on microfluidics for drug delivery applications and assists practitioners developing novel drug delivery platforms using microfluidics. It explores advances in microfluidics for drug delivery applications from different perspectives, covering device fabrication, fluid dynamics, cutting-edge microfluidic technology in the global drug delivery industry, lab-on-chip nano/micro fabrication and drug encapsulation, cell encapsulation and delivery, and cell- drug interaction screening. These microfluidic platforms have revolutionized the drug delivery field, but also show great potential for industrial applications. Presents detailed coverage on the fabrication of novel drug delivery systems with desired characteristics, such as uniform size, Janus particles, and particular or combined responsiveness Includes a variety of case studies that explain principles Focuses on commercialization, cost, safety, society and educational issues of microfluidic applications, showing how microfluidics is used in the real world

Introduction to Microfabrication

Introduction to Microfabrication
  • Author : Sami Franssila
  • Publisher :Unknown
  • Release Date :2005-01-28
  • Total pages :422
  • ISBN : 9780470020562
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Summary : Microfabrication is the key technology behind integrated circuits, microsensors, photonic crystals, ink jet printers, solar cells and flat panel displays. Microsystems can be complex, but the basic microstructures and processes of microfabrication are fairly simple. Introduction to Microfabrication shows how the common microfabrication concepts can be applied over and over again to create devices with a wide variety of structures and functions. Featuring: * A comprehensive presentation of basic fabrication processes * An emphasis on materials and microstructures, rather than device physics * In-depth discussion on process integration showing how processes, materials and devices interact * A wealth of examples of both conceptual and real devices Introduction to Microfabrication includes 250 homework problems for students to familiarise themselves with micro-scale materials, dimensions, measurements, costs and scaling trends. Both research and manufacturing topics are covered, with an emphasis on silicon, which is the workhorse of microfabrication. This book will serve as an excellent first text for electrical engineers, chemists, physicists and materials scientists who wish to learn about microstructures and microfabrication techniques, whether in MEMS, microelectronics or emerging applications.

Micro-Manufacturing

Micro-Manufacturing
  • Author : Muammer Koc,Tugrul Ozel
  • Publisher :Unknown
  • Release Date :2011-05-06
  • Total pages :400
  • ISBN : 1118010566
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Summary : This book is the first of its kind to collectively address design-based and mechanical micro-manufacturing topics in one place. It focuses on design and materials selection, as well as the manufacturing of micro-products using mechanical-based micro-manufacturing process technologies. After addressing the fundamentals and non-metallic-based micro-manufacturing processes in the semiconductor industry, it goes on to address specific metallic-based micro-manufacturing processes, such as: micro-forming, micro-machining, micro-molding, micro-laser processing, micro-layered manufacturing, micro-joining, micro-assembly and materials handling, and microEDM and ECM. The book provides an in-depth understanding of materials behavior at micro-scales and under different micro-scale processing conditions, while also including a wide variety of emerging micro-scale manufacturing issues and examples.

Micromanufacturing Processes

Micromanufacturing Processes
  • Author : V.K. Jain
  • Publisher :Unknown
  • Release Date :2016-04-19
  • Total pages :429
  • ISBN : 9781439852910
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Summary : Increased demand for and developments in micromanufacturing have created a need for a resource that covers both the science and technology of this rapidly growing area. With contributions from eminent professors and researchers actively engaged in teaching, research, and development, Micromanufacturing Processes details the basic principles, tools,