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Microwave/RF Applicators and Probes

Microwave/RF Applicators and Probes
  • Author : Mehrdad Mehdizadeh
  • Publisher :Unknown
  • Release Date :2015-09-16
  • Total pages :440
  • ISBN : 9780323328425
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Summary : Microwave/RF Applicators and Probes for Material Heating, Sensing, and Plasma Generation, Second Edition, encompasses the area of high-frequency applicators and probes for material interactions as an integrated science. Based on practical experience rather than entirely on theoretical concepts, and emphasizing phenomenological explanations and well-annotated figures, the book represents one of the most important resources on the topics of microwave technologies, applications of RF and microwaves in industry (industrial heating and drying), and microwave engineering. After covering the basics of field-material interactions, the book reviews and categorizes probes and applicators, demonstrates their real-world applications, and offers numerically solved examples. Readers will find valuable design rules and principles of high-frequency applicators and probes for material processing and sensing applications in this expanded edition. Presents new information on how the interactions of electromagnetic fields with materials at high frequencies have given rise to a vast array of practical applications in industry, science, medicine, and consumer markets Thoroughly revised and expanded edition, providing an update on the most recent trends and findings Contains many new sections within existing chapters, along with new chapters on applicators for plasmas at microwave/RF frequencies

Microwave/RF Applicators and Probes for Material Heating, Sensing, and Plasma Generation

Microwave/RF Applicators and Probes for Material Heating, Sensing, and Plasma Generation
  • Author : Mehrdad Mehdizadeh
  • Publisher :Unknown
  • Release Date :2009-12-22
  • Total pages :400
  • ISBN : 0815519869
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Summary : Interactions of electromagnetic fields with materials at high frequencies have given rise to a vast array of practical applications in industry, science, medicine, and consumer markets. Applicators or probes, which are the front end of these systems, provide the field that interacts with the material. This book takes an integrated approach to the area of high frequency applicators and probes for material interactions, providing a toolkit for those who design these devices. Particular attention is given to real-world applications and the latest developments in the area. Mathematical methods are provided as design tools, and are often simplified via curve-fitting techniques that are particularly usable by handheld calculators. Useful equations and numerically solved examples, using situations encountered in practice, are supplied. Above all, this volume is a comprehensive and useful reference where the reader can find design rules and principles of high frequency applicators and probes for material processing and sensing applications. Electronic and electrical R&D engineers, physicists, university professors and students will all find this book a valuable reference. Mehrdad Mehdizadeh is with the DuPont Company, Engineering Research & Technology Division in Wilmington, Delaware. His areas of expertise include high frequency hardware and electromagnetic methods of processing, sensing, and characterization of materials. His work and innovation in industrial, scientific, and medical applications of radio frequency and microwaves has resulted in 19 US patents and a number of publications. He earned his Ph.D. and M.S. from Marquette University (1983, 1980), and a B.S. from Sharif University of Technology (1977), all in electrical engineering. Dr. Mehdizadeh is a Senior Member of the Institute of Electrical and Electronic Engineers (IEEE ), Sigma Xi (Scientific Research Society), the International Microwave Power Institute (IMPI ), and a voting member of IEEE Standard Association. • Books in this area are usually theoretical; this book provides practical information for those who actually intend to design a system • Features real world and numerically solved examples, and curve-fitted simple equations to replace complex equations provided in typical texts • Author is a voting member of IEEE Standards Association

Microwave-Assisted Concrete Technology

Microwave-Assisted Concrete Technology
  • Author : K.C. Gary Ong,Ali Akbarnezhad
  • Publisher :Unknown
  • Release Date :2014-12-15
  • Total pages :264
  • ISBN : 9781466583931
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Summary : Microwave Technology: A Powerful Technique The first book to combine microwave-assisted heating technology and concrete technology (covering production, demolition, and recycling), Microwave-Assisted Concrete Technology: Production, Demolition and Recycling explains the underlying concepts and fundamentals involved in the microwave-assisted heating of concrete. While most books on microwave heating focus on the behavior of microwaves, this text centers on the response of materials subjected to microwaves, and specifically concentrates on materials used in the concrete industry. A ready reference for the design of microwave-based equipment, the book describes how microwave-assisted heating technology may be harnessed in the production, demolition, and recycling of concrete. It covers microwave-assisted applications, the design concepts of microwave heating systems (generators and applicators) used in microwave-assisted concrete-processing methods, and process control techniques used to monitor the condition of concrete during the heating process. Learn How to use the Microwave-Assisted Heating Process for Industry The book is written from the perspective of modern practitioners in the construction industry, and addresses the technological, scientific, and environmental issues involved in replacing conventional approaches with microwave heating. The authors categorize the applications of microwave heating in concrete technology into three areas: microwave-assisted accelerated curing of concrete, microwave-assisted selective demolition and drilling of concrete, and the microwave-assisted recycling of concrete. They discuss sustainability and the environmental impact of incorporating sustainable concrete production, demolition, and recycling using microwave-assisted heating technologies, and environmentally friendly microwave heating applications. This text covers: The basics of concrete-microwave field interactions Microwave-assisted concrete technologies for use in the production, demolition, and recycling of concrete as well as the control mechanisms required to ensure the efficiency of these methods The design of microwave heating applicators Microwave-Assisted Concrete Technology: Production, Demolition and Recycling does not require a familiarity with electromagnetism science and can be easily understood by civil engineers as well as by readers with little or no engineering background.

Adaptive and Intelligent Temperature Control of Microwave Heating Systems with Multiple Sources

Adaptive and Intelligent Temperature Control of Microwave Heating Systems with Multiple Sources
  • Author : Sun, Yiming
  • Publisher :Unknown
  • Release Date :2016-04-28
  • Total pages :262
  • ISBN : 9783731504672
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Summary :

Innovative Food Processing Technologies

Innovative Food Processing Technologies
  • Author : Anonim
  • Publisher :Unknown
  • Release Date :2020-08-18
  • Total pages :2480
  • ISBN : 9780128157824
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Summary : Food process engineering, a branch of both food science and chemical engineering, has evolved over the years since its inception and still is a rapidly changing discipline. While traditionally the main objective of food process engineering was preservation and stabilization, the focus today has shifted to enhance health aspects, flavour and taste, nutrition, sustainable production, food security and also to ensure more diversity for the increasing demand of consumers. The food industry is becoming increasingly competitive and dynamic, and strives to develop high quality, freshly prepared food products. To achieve this objective, food manufacturers are today presented with a growing array of new technologies that have the potential to improve, or replace, conventional processing technologies, to deliver higher quality and better consumer targeted food products, which meet many, if not all, of the demands of the modern consumer. These new, or innovative, technologies are in various stages of development, including some still at the R&D stage, and others that have been commercialised as alternatives to conventional processing technologies. Food process engineering comprises a series of unit operations traditionally applied in the food industry. One major component of these operations relates to the application of heat, directly or indirectly, to provide foods free from pathogenic microorganisms, but also to enhance or intensify other processes, such as extraction, separation or modification of components. The last three decades have also witnessed the advent and adaptation of several operations, processes, and techniques aimed at producing high quality foods, with minimum alteration of sensory and nutritive properties. Some of these innovative technologies have significantly reduced the thermal component in food processing, offering alternative nonthermal methods. Food Processing Technologies: A Comprehensive Review covers the latest advances in innovative and nonthermal processing, such as high pressure, pulsed electric fields, radiofrequency, high intensity pulsed light, ultrasound, irradiation and new hurdle technology. Each section will have an introductory article covering the basic principles and applications of each technology, and in-depth articles covering the currently available equipment (and/or the current state of development), food quality and safety, application to various sectors, food laws and regulations, consumer acceptance, advancements and future scope. It will also contain case studies and examples to illustrate state-of-the-art applications. Each section will serve as an excellent reference to food industry professionals involved in the processing of a wide range of food categories, e.g., meat, seafood, beverage, dairy, eggs, fruits and vegetable products, spices, herbs among others.

Frontiers in Bioenergy and Biofuels

Frontiers in Bioenergy and Biofuels
  • Author : Eduardo Jacob-Lopes,Leila Queiroz Zepka
  • Publisher :Unknown
  • Release Date :2017-01-25
  • Total pages :524
  • ISBN : 9789535128915
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Summary : Frontiers in Bioenergy and Biofuels presents an authoritative and comprehensive overview of the possibilities for production and use of bioenergy, biofuels, and coproducts. Issues related to environment, food, and energy present serious challenges to the success and stability of nations. The challenge to provide energy to a rapidly increasing global population has made it imperative to find new technological routes to increase production of energy while also considering the biosphere's ability to regenerate resources. The bioenergy and biofuels are resources that may provide solutions to these critical challenges. Divided into 25 discreet parts, the book covers topics on characterization, production, and uses of bioenergy, biofuels, and coproducts. Frontiers in Bioenergy and Biofuels provides an insight into future developments in each field and extensive bibliography. It will be an essential resource for researchers and academic and industry professionals in the energy field.

Microwave Processing of Materials

Microwave Processing of Materials
  • Author : National Research Council,Division on Engineering and Physical Sciences,National Materials Advisory Board,Commission on Engineering and Technical Systems,Committee on Microwave Processing of Materials: An Emerging Industrial Technology
  • Publisher :Unknown
  • Release Date :1994-02-01
  • Total pages :164
  • ISBN : 9780309050272
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Summary : Microwaves can be effectively used in the processing of industrial materials under a wide range of conditions. However, microwave processing is complex and multidisciplinary in nature, and a high degree of technical knowledge is needed to determine how, when, and where the technology can be most profitably utilized. This book assesses the potential of microwave technology for industrial applications, reviews the latest equipment and processing methods, and identifies both the gaps in understanding of microwave processing technology and the promising development opportunities that take advantage of this new technology's unique performance characteristics.

Medical Device Technologies

Medical Device Technologies
  • Author : Gail D. Baura
  • Publisher :Unknown
  • Release Date :2012
  • Total pages :512
  • ISBN : 9780123749765
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Summary : The goal of this textbook is to provide undergraduate engineering students with an introduction to commonly manufactured medical devices. It is the first textbook that discusses both electrical and mechanical medical devices. The first 20 chapters are medical device technology chapters; the remaining 8 chapters are medical device laboratory experiment chapters. Each medical device chapter begins with an exposition of appropriate physiology, mathematical modeling or biocompatibility issues, and clinical need. A device system description and system diagram provide details on technology function and administration of diagnosis and/or therapy. The systems approach enables students to quickly identify the relationships between devices. Device key features are based on five applicable consensus standard requirements from organizations such as ISO and the Association for the Advancement of Medical Instrumentation (AAMI). Key Features: The medical devices discussed are Nobel Prize or Lasker Clinical Prize winners, vital signs devices, and devices in high industry growth areas Three significant Food and Drug Administration (FDA) recall case studies which have impacted FDA medical device regulation are included in appropriate device chapters Exercises at the end of each chapter include traditional homework problems, analysis exercises, and four questions from assigned primary literature Eight laboratory experiments are detailed that provide hands-on reinforcement of device concepts

RF / Microwave Interaction with Biological Tissues

RF / Microwave Interaction with Biological Tissues
  • Author : André Vander Vorst,Arye Rosen,Youji Kotsuka
  • Publisher :Unknown
  • Release Date :2006-02-06
  • Total pages :300
  • ISBN : 9780471752042
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Summary : From engineering fundamentals to cutting-edge clinicalapplications This book examines the biological effects of RF/microwaves andtheir medical applications. Readers will discover new developmentsin therapeutic applications in such areas as cardiology, urology,surgery, ophthalmology, and oncology. The authors also presentdeveloping applications in such areas as cancer detection and organimaging. Focusing on frequency ranges from 100 kHz to 10 GHz, RF/MicrowaveInteraction with Biological Tissues is divided into sixchapters: * Fundamentals in Electromagnetics--examines penetration ofRF/microwaves into biological tissues; skin effect; relaxationeffects in materials and the Cole-Cole model (display); the nearfield of an antenna; blackbody radiation and the various associatedlaws; and microwave measurements. * RF/Microwave Interaction Mechanisms in BiologicalMaterials--includes a section devoted to the fundamentals ofthermodynamics and a discussion on energy and entropy. * Biological Effects--investigates the effects of radio frequencyfields on the nervous system, the brain and spinal cord, theblood-brain barrier, and cells and membranes. * Thermal Therapy--includes a description of applicators and anextensive discussion on the foundation of dielectric heating andinductive heating. * EM-Wave Absorbers Protecting the Biological and MedicalEnvironment--investigates materials for EM-wave absorbers from botha theoretical and applications perspective. Special attention isgiven to ferrite absorbers. * RF/Microwave Delivery Systems for TherapeuticApplications--begins with the fundamental features of majorcomponents used in RF/microwave delivery systems for therapeuticapplications. New research towards the development of futuremeasurement techniques is also presented. The book features problem sets at the end of each chapter, makingit an excellent introduction for bioengineering and engineeringstudents. Researchers, physicians, and technicians in the fieldwill also find this an excellent reference that offers all thefundamentals, the most cutting-edge applications, and insight intofuture developments. An Instructor's Manual presenting detailed solutions to all theproblems in the book is available from the Wiley editorialdepartment.

Microwave Discharges

Microwave Discharges
  • Author : Carlos M. Ferreira,Michel Moisan
  • Publisher :Unknown
  • Release Date :2013-11-21
  • Total pages :564
  • ISBN : 9781489911308
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Summary : Proceedings of a NATO ARW held in Vimeiro, Portugal, May 11-15, 1992

Emerging Microwave Technologies in Industrial, Agricultural, Medical and Food Processing

Emerging Microwave Technologies in Industrial, Agricultural, Medical and Food Processing
  • Author : Kok Yeow You
  • Publisher :Unknown
  • Release Date :2018-07-04
  • Total pages :214
  • ISBN : 9781789234084
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Summary : Recently, the rapid development of microwave technologies has had a significant impact on current industrial, agricultural, medical, and food processing fields. This book is a self-contained collection of valuable scholarly papers related to the microwave applications. This book contains 10 chapters that cover several subtopics of the microwave engineering, namely, microwave system design models, emerging microwave devices, and microwave heating/drying technologies. Hence, this book should be useful to the academics, scientists, practicing researchers, and postgraduate students whose works are related to microwave technologies.

Plasma Catalysis

Plasma Catalysis
  • Author : Annemie Bogaerts
  • Publisher :Unknown
  • Release Date :2019-04-02
  • Total pages :246
  • ISBN : 9783038977506
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Summary : Plasma catalysis is gaining increasing interest for various gas conversion applications, such as CO2 conversion into value-added chemicals and fuels, N2 fixation for the synthesis of NH3 or NOx, methane conversion into higher hydrocarbons or oxygenates. It is also widely used for air pollution control (e.g., VOC remediation). Plasma catalysis allows thermodynamically difficult reactions to proceed at ambient pressure and temperature, due to activation of the gas molecules by energetic electrons created in the plasma. However, plasma is very reactive but not selective, and thus a catalyst is needed to improve the selectivity. In spite of the growing interest in plasma catalysis, the underlying mechanisms of the (possible) synergy between plasma and catalyst are not yet fully understood. Indeed, plasma catalysis is quite complicated, as the plasma will affect the catalyst and vice versa. Moreover, due to the reactive plasma environment, the most suitable catalysts will probably be different from thermal catalysts. More research is needed to better understand the plasma–catalyst interactions, in order to further improve the applications.

Radio-Frequency Heating in Food Processing

Radio-Frequency Heating in Food Processing
  • Author : George B. Awuah,Hosahalli S. Ramaswamy,Juming Tang
  • Publisher :Unknown
  • Release Date :2014-12-04
  • Total pages :422
  • ISBN : 9781439837054
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Summary : Radio-Frequency Heating in Food Processing: Principles and Applications covers the fundamentals of radio-frequency (RF) heating and the use of RF-heating technologies in modern food processing, preservation, and related industries. Focusing on industrial and lab-scale applications where RF heating has been employed successfully or reported to have

Luminescence Thermometry

Luminescence Thermometry
  • Author : Miroslav Dramićanin
  • Publisher :Unknown
  • Release Date :2018-04-21
  • Total pages :302
  • ISBN : 9780081020302
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Summary : Luminescence Thermometry: Methods, Materials, and Applications presents the state-of-the art applications of luminescence thermometry, giving a detailed explanation of luminescence spectroscopic schemes for the read-out of temperature, while also describing the diverse materials that are capable of sensing temperature via luminescence. Chapters cover the fundamentals of temperature, traditional thermometers and their figures of merit, a concise description of optical thermometry methods, luminescence and instrumentation, and an explanation of the ways in which increases in temperature quench luminescence. Additional sections focus on materials utilized for luminescence thermometry and the broad range of applications for luminescence thermometry, including temperature measurement at the nanoscale and the application of multifunctional luminescent materials. Provides an overview of luminescence thermometry applications, including high-temperature, biomedical, nanoscale and multifunctional Delves into luminescence thermometry by materials group, including Rare-earth and transition Metal Ion Doped, Semiconductors, Quantum Dots and Organic materials Gives a concise introduction of the latest methods of temperature measurement, including luminescence spectroscopic schemes and methods of analysis

Microwave Chemical and Materials Processing

Microwave Chemical and Materials Processing
  • Author : Satoshi Horikoshi,Robert F. Schiffmann,Jun Fukushima,Nick Serpone
  • Publisher :Unknown
  • Release Date :2017-11-28
  • Total pages :393
  • ISBN : 9789811064661
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Summary : The principal aim of this book is to introduce chemists through a tutorial approach to the use of microwaves by examining several experiments of microwave chemistry and materials processing. It will subsequently enable chemists to fashion their own experiments in microwave chemistry or materials processing. Microwave heating has become a popular methodology in introducing thermal energy in chemical reactions and material processing in laboratory-scale experiments. Several research cases where microwave heating has been used in a wide range of fields have been reported, including organic synthesis, polymers, nanomaterials, biomaterials, and ceramic sintering, among others. In most cases, microwave equipment is used as a simple heat source. Therefore the principal benefits of microwave radiation have seldom been taken advantage of. One reason is the necessity to understand the nature of electromagnetism, microwave engineering, and thermodynamics. However, it is difficult for a chemist to appreciate these in a short time, so they act as barriers for the chemist who might take an interest in the use of microwave radiation. This book helps to overcome these barriers by using figures and diagrams instead of equations as much as possible.

Comprehensive Clinical Plasma Medicine

Comprehensive Clinical Plasma Medicine
  • Author : Hans-Robert Metelmann,Thomas von Woedtke,Klaus-Dieter Weltmann
  • Publisher :Unknown
  • Release Date :2018-05-04
  • Total pages :526
  • ISBN : 9783319676272
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Summary : This book presents the state of the art in clinical plasma medicine and outlines translational research strategies. Written by an international group of authors, it is divided into four parts. Part I is a detailed introduction and includes basic and recent research information on plasma sciences, plasma devices and mechanisms of biological plasma effects. Parts II and III provide valuable clinical insights f.e. into the treatment of superficial contaminations, ulcerations, wounds, treatment of cells in cancer, special indications like in heart surgery, dentistry, palliative treatment in head and neck cancer or the use of plasma in hygiene. Part IV offers information on how and where to qualify in plasma medicine and which companies produce and supply medical devices and is thus of particular interest to medical practitioners. This comprehensive book offers a sciences based practical to the clinical use of plasma and includes an extended selection of scientific medical data and translational literature.

Vacuum Deposition onto Webs, Films and Foils

Vacuum Deposition onto Webs, Films and Foils
  • Author : Charles Bishop
  • Publisher :Unknown
  • Release Date :2015-08-15
  • Total pages :602
  • ISBN : 9780323296908
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Summary : Vacuum Deposition onto Webs: Films and Foils, Third Edition, provides the latest information on vacuum deposition, the technology that applies an even coating to a flexible material that can be held on a roll, thereby offering a much faster and cheaper method of bulk coating than deposition onto single pieces or non-flexible surfaces such as glass. This technology has been used in industrial-scale applications for some time, including a wide range of metalized packaging. Its potential as a high-speed, scalable process has seen an increasing range of new products emerging that employ this cost-effective technology, including solar energy products that are moving from rigid panels onto cheaper and more versatile flexible substrates, flexible electronic circuit ‘boards’, and flexible displays. In this third edition, all chapters are thoroughly revised with a significant amount of new information added, including newly developed barrier measurement techniques, improved in-vacuum monitoring technologies, and the latest developments in Atomic Layer Deposition (ALD). Provides the know-how to maximize productivity of vacuum coating systems Thoroughly revised with a significant amount of new information added, including newly developed barrier measurement techniques, improved in-vacuum monitoring technologies, and the latest on Atomic Layer Deposition (ALD) Presents the latest information on vacuum deposition, the technology that applies an even coating to a flexible material that can be held on a roll, thereby offering a much faster and cheaper method of bulk coating Enables engineers to specify systems more effectively and enhances dialogue between non-specialists and suppliers/engineers Empowers those in rapidly expanding fields such as solar energy, display panels, and flexible electronics to unlock the potential of vacuum coating to transform their processes and products

Non-Newtonian Flow and Applied Rheology

Non-Newtonian Flow and Applied Rheology
  • Author : R. P. Chhabra,J.F. Richardson
  • Publisher :Unknown
  • Release Date :2011-04-08
  • Total pages :536
  • ISBN : 9780080564937
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Summary : This book bridges the gap between the theoretical work of the rheologist, and the practical needs of those who have to design and operate the systems in which these materials are handled or processed. It is an established and important reference for senior level mechanical engineers, chemical and process engineers, as well as any engineer or scientist who needs to study or work with these fluids, including pharmaceutical engineers, mineral processing engineers, medical researchers, water and civil engineers. This new edition covers a considerably broader range of topics than its predecessor, including computational fluid dynamics modelling techniques, liquid/solid flows and applications to areas such as food processing, among others. * Written by two of the world's leading experts, this is the only dedicated non-Newtonian flow reference in print. * Since first publication significant advances have been made in almost all areas covered in this book, which are incorporated in the new edition, including developments in CFD and computational techniques, velocity profiles in pipes, liquid/solid flows and applications to food processing, and new heat/mass transfer methods and models. * Covers both basic rheology and the fluid mechanics of NN fluids ? a truly self-contained reference for anyone studying or working with the processing and handling of fluids

The Microwave Processing of Foods

The Microwave Processing of Foods
  • Author : Marc Regier,Kai Knoerzer,Helmar Schubert
  • Publisher :Unknown
  • Release Date :2016-11-01
  • Total pages :484
  • ISBN : 9780081005316
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Summary : The Microwave Processing of Foods, Second Edition, has been updated and extended to include the many developments that have taken place over the past 10 years. Including new chapters on microwave assisted frying, microwave assisted microbial inactivation, microwave assisted disinfestation, this book continues to provide the basic principles for microwave technology, while also presenting current and emerging research trends for future use development. Led by an international team of experts, this book will serve as a practical guide for those interested in applying microwave technology. Provides thoroughly up-to-date information on the basics of microwaves and microwave heating Discusses the main factors for the successful application of microwaves and the main problems that may arise Includes current and potential future applications for real-world application as well as new research and advances Includes new chapters on microwave-assisted frying, microbial inactivation, and disinfestation

A Guide to Canada's Export Controls

A Guide to Canada's Export Controls
  • Author : Anonim
  • Publisher :Unknown
  • Release Date :1993
  • Total pages :94
  • ISBN : 0662202864
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Summary :

Plasma Technology

Plasma Technology
  • Author : M. Capitelli,C. Gorse
  • Publisher :Unknown
  • Release Date :2012-12-06
  • Total pages :224
  • ISBN : 9781461534006
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Summary : The present book contains the proceedings of the workshop "Plasma Technology and Applications" which was held at 11 Ciocco (Lucca-Italy) during 5-6 July 1991. The workshop was organized just before ICPIG XX to emphasize the role of plasma physics and plasma chemistry in different fields of technology. Topics cover different applications such as lamps, plasma treatment of materials (etching, deposition, nitriding), plasma sources (microwave excitation, negative ion sources) and plasma destruction of pollutants. Several chapters deal with basic concepts in plasma physics, non equilibrium plasma modeling and plasma diagnostics as well as with laser interaction with solid targets. The authors gratefully acknowledge the financial support provided by university of Bari (Italy) and by CNR (Centro di Studio per la Chimica dei Plasmi, Istituto di Fisica Atomica e Molecolare (IFAM) and Progetto Finalizzato Materiali Speciali per Tecnologie Avanzate) as well as the sponsorship of ENEA. M. Capitelli C. Gorse v CONTENTS Plasmas in nature, laboratory and technology 1 A.M. Ignatov and A.A. Rukhadze Laser diagnostics of plasmas 11 L. Pyatnitsky Probe diagnostics of plasmas 27 G. Dilecce Theory, properties and applications of non equilibrium plasmas created by external energy sources 45 E. Son Non-Equilibrium plasma modeling 59 M. Capitel1i, R. Celiberto, G. Capriati, C. Gorse and S. Longo Gas discharge lamps 81 M. Koedam Plasma etching processes and diagnostics 93 R. d'Agostino and F. Fracassi Plasma deposition: processes and diagnostics 109 A.